Properties of AlTiN Films Deposited by Cathodic Arc Deposition
نویسندگان
چکیده
منابع مشابه
Macroparticles in films deposited by steered cathodic arc
The macroparticle content of titanium films deposited using a steered vacuum cathodic arc has been investigated. It has been found that the macroparticle number decreases with increasing steering magnetic field strength, and experimental results are found to be consistent with the model in which the number and mass of macroparticles arising from a cathode spot are proportional to the cathode sp...
متن کاملDeposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
متن کاملEvaluation of tribological properties of (Ti,Al)CN/DLC composite coatings deposited by cathodic arc method.
In this study, Ti, Al and N doped DLC – referred to here after as “(Ti,Al)CN/DLC composite”- coating and pure diamond-like coating (DLC) were produced by cathodic arc deposition technique and the effects of the coating thickness on their tribological properties were evaluated. The coatings were characterized, using scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffrac...
متن کاملStructure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique
Aluminum nitride (AlN) film coatings have been obtained by a new technique of hybrid helikon-arc ion-plasma deposition. Possibility to combine the magnetic-filtered arc plasma deposition technique with a treatment in RF plasma of helicon discharge allowed us to deposit AlN coatings on thermolabile substrates, significantly increasing the deposition rate. A study of spectral properties of AlN fi...
متن کاملCyclic Voltammetric Behavior of Nitrogen-Doped Tetrahedral Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Nitrogen-doped tetrahedral amorphous carbon (ta-C :N) films were deposited by filtered cathodic vacuum arc (FCVA) technique using nitrogen as a background gas. The structure of the ta-C :N films was studied with X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy in terms of nitrogen flow rate used during the film deposition. Potential windows of the films measured in deaerated and un...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Korean institute of surface engineering
سال: 2016
ISSN: 1225-8024
DOI: 10.5695/jkise.2016.49.3.307